{"text_format":"3","workbook":"xlsx","n_sheets":1,"sheets":["Sheet1"],"not_rendered":{"defined_names":1,"comments":1},"read":"whole","date_system":"1900"}

{"sheet":"Sheet1","index":0,"n_rows":88,"n_cols":11,"rows_kept":88}
["序号","Module","Capagroup","ToolID","新旧机台","厂商","型号","设备名称","设备状态","数量","单位"]
[1,"WAT","/","AEAGBDRY03","旧设备","VERTEQ","1600-55A","DRY","Rls",1,"台"]
[2,"WAT",null,"AEAGBDTP01","旧设备"," ","手动揭膜机","Wafer Detape",null,1,"台"]
[3,"WAT",null,"AEAGBWBE01","旧设备","SCP","SCP-8400","Backside Clean","Rls",1,"台"]
[4,"DF","D-CUR-GM","AEAGDCUR01","旧设备","THERMCO","THERMCO TMX10K","高温扩散炉管","Rls",1,"台"]
[5,"DF","D-CUR-GM","AEAGDCUR02","旧设备","THERMCO","THERMCO TMX10K","高温扩散炉管","Tier3",1,"台"]
[6,"DF","D-IMP-GM","AEAGDMCI01","旧设备","VARIAN","E220","中束流离子注入机","Tier3",1,"台"]
[7,"DF","D-IMP-GM","AEAGDMCI02","旧设备","VARIAN","E220","中束流离子注入机","Rls",1,"台"]
[8,"DF",null,"AEAGDNIT03","旧设备","THERMCO","THERMCO TMX10K","高温扩散炉管","Rls",1,"台"]
[9,"DF",null,"AEAGDOXA02","旧设备","THERMCO"," ","高温扩散炉管","Rls",1,"台"]
[10,"DF",null,"AEAGDPOX01","旧设备","THERMCO","THERMCO TMX10K","高温扩散炉管","Rls",1,"台"]
[11,"DF","D-RTS-GM","AEAGDRTS01","旧设备","AG","4108","正面快速退火","Rls",1,"台"]
[12,"DF","D-RTS-GM","AEAGDRTS03","旧设备","AG","4100","正面快速退火","Rls",1,"台"]
[13,"PH","D-EFM-GM","AEAGDTHK03","旧设备","THERMAWAVE","2690","膜厚仪","Tier3",1,"台"]
[14,"PH","/","AEAGEAIT03","旧设备","KLA","6200","6200颗粒测量仪","Rls",1,"台"]
[15,"ET","E-DSM-GM2","AEAGEDSM07","旧设备","LAM","490","DESCUM","Rls",1,"台"]
[16,"ET","E-DSM-GM2","AEAGEDSM08","旧设备","LAM","480","DESCUM","Rls",1,"台"]
[17,"ET","E-DSM-GM1","AEAGEISO01","旧设备","GASONICS","AE-2001","AE2001刻蚀机","Rls",1,"台"]
[18,"ET",null,"AEAGEISO02","旧设备","GASONICS","AE-2001","DESCUM","Tier3",1,"台"]
[19,"ET",null,"AEAGEMTE01","旧设备","无锡瑞达","FZLF-001","Al腐蚀","Tier3",1,"台"]
[20,"ET","E-OXT-GM","AEAGEOXD02","旧设备","AMAT","P5000","介质刻蚀机","Rls",1,"台"]
[21,"ET","E-PRS-GF","AEAGEPRS01","旧设备","GASONICS","AURA-1000","A1000去胶机","Rls",1,"台"]
[22,"ET","E-O2F-GB","AEAGEPRS02","旧设备","GASONICS","AURA-1000","Plasma Resist Strip","Rls",1,"台"]
[23,"ET","E-SOL-GM","AEAGESOL01","旧设备","ACT-2","常州硅密","有机清洗机-Solvent","Rls",1,"台"]
[24,"ET",null,"AEAGESPC02","旧设备","　VERTEQ","　MCS2600-4AT","   备件清洗机",null,1,"台"]
[25,"ET","/","AEAGEWCC02","旧设备","无锡瑞达","EW-25","Cassette Cleaner","Rls",1,"台"]
[26,"ET","E-WEB-GM","AEAGEWEB01","旧设备","LAM","4720","W-EB","Rls",1,"台"]
[27,"ET","E-WEB-GM","AEAGEWEB02","旧设备","LAM","4720","W-EB","Rls",1,"台"]
[28,"ET","E-SC1-GF","AEAGEWSC01","旧设备","SPMC","常州硅密","SC1 clean","Rls",1,"台"]
[29,"PH","E-INS-GM","AEAGMQOM10","新设备","Nikon","NWL200","显微镜（自动）","Rls",1,"台"]
[30,"PH","/","AEAGMWTK01","旧设备","SONY","U30B","WAFER THICKNESS MEASUREMENT","Rls",1,"台"]
[31,"PH","/","AEAGQINS02","旧设备","OYLMBUS","MX50","手动显微镜","Rls",1,"台"]
[32,"PH","P-EXP-GM2","AEAGPI0905","旧设备","Nikon","2005I9C","曝光机","Rls",1,"台"]
[33,"PH","P-EXP-GM3","AEAGPI0907","旧设备","Nikon","2005I9C","曝光机","Rls",1,"台"]
[34,"PH","P-EXP-GM2","AEAGPI0908","旧设备","Nikon","2005I9C","曝光机","Tier3",1,"台"]
[35,"PH","P-SEM-GM","AEAGPSEM02","旧设备","Hitachi",8820,"线宽量测机","Rls",1,"台"]
[36,"PH","P-TRC-GM2","AEAGPTRC05","旧设备","TEL","MARK-V","涂布机","Rls",1,"台"]
[37,"PH","P-TRC-GM3","AEAGPTRC06","旧设备","TEL","MARK-V","涂布机","Rls",1,"台"]
[38,"PH","P-TRD-GM1","AEAGPTRD06","旧设备"," "," ","显影机","Tier3",1,"台"]
[39,"TF","T-TES-GM","AEAGTCOX01","旧设备","AMI","P5000","化学气相淀积机","Rls",1,"台"]
[40,"TF","T-TES-GM","AEAGTCOX04","旧设备","AMAT","5000","化学气相淀积机","Rls",1,"台"]
[41,"TF","T-TES-GM","AEAGTCOX05","旧设备","AMAT","5000","化学气相淀积机","Rls",1,"台"]
[42,"TF","T-SIN-GM1","AEAGTCSN01","旧设备","AMI","P5000","化学气相淀积机","Rls",1,"台"]
[43,"TF","T-SIN-GM2","AEAGTCSN02","旧设备","AMI","P5000","化学气相淀积机","Rls",1,"台"]
[44,"TF","T-PEX-GF","AEAGTCSN03","旧设备","AMAT","P5000","化学气相淀积机","Rls",1,"台"]
[45,"TF","T-TUN-GB","AEAGTCTW02","旧设备","AMAT","P5000","化学气相淀积机","Rls",1,"台"]
[46,"PH","/","AEAGTRSM01","旧设备","OMNIMAP","RS55","电阻测试","Rls",1,"台"]
[47,"PH","/","AEAGTSRS01","旧设备","KLA","FLX 2320","应力仪(Si线旧机）","Rls",1,"台"]
[48,"ET",null,"AEASEWPR01","旧设备","YOUTECH","Y07009A-2","宥诚酸槽",null,1,"台"]
[49,"PH",null,"AEASPTRD10","旧设备","TEL","MARK-V","显影机","Tier3",1,"台"]
[50,"外延",null,"AEBGVPLA01","新设备","Etamax ",0,"PL光谱仪","Tier3",1,"台"]
[51,"外延",null,"AEBGVEPI03","新设备","Aixtron","Aixtron_G5+","外延炉","Rls",1,"台"]
[52,"PH","P-EXP-GM1","AEAGPISF01","新设备","Nikon","NSR-SF120","曝光机(翻新)","Tier3",1,"台"]
[53,"ET","E-PVA-GF","AEAGEICP04","新设备","Plasma Thermal","Plasma therm_VCX600","ICP ETCH","Rls",1,"台"]
[54,"ET","E-AME-GF","AEAGEICP02","新设备","Plasma Thermal","Plasma therm_VCX600","ICP ETCH","Rls",1,"台"]
[55,"ET","E-GSE-GM","AEAGEICP03","新设备","Plasma Thermal","Plasma therm_VCX600","ICP ETCH","Rls",1,"台"]
[56,"ET","E-PVO-GM","AEAGEICP05","新设备","Plasma Thermal","Plasma therm_VCX600","ICP ETCH","Tier3",1,"台"]
[57,"ET","E-PGD-GF","AEAGEICP01","新设备","Plasma Thermal","Plasma therm_VCX600","ICP ETCH","Rls",1,"台"]
[58,"TF","T-ALN-GF","AEAGTALD05","新设备","ASM","A400","ALD原子层沉积","Tier3",1,"台"]
[59,"TF","T-CMP-GB","AEAGTCMP01","新设备","AMAT","AMAT_MIRRA_ontrak(二手）","CMP-ILD","Rls",1,"台"]
[60,"TF",null,"AEAGTCMP02","新设备","AMAT","AMAT_MIRRA_ontrak(二手）","CMP-W","Rls",1,"台"]
[61,"SIC外延",null,"AEBSMAFM06","新设备","新凯来","ME6010","AFM","EQ setup",1,"台"]
[62,"PH",null,"AEAGYKLA02","新设备","KLA","KLA_8520","GaN缺陷扫描","Rls",1,"台"]
[63,"ET","E-SCR-GM","AEAGEFSC01","旧设备","DNS","SS-W629-B","擦片机","Rls",1,"台"]
[64,null,null,"AEBSMXRF02","新设备","Rigaku-圭世",3760,"TXRF",null,1,"台"]
[65,"外延",null,"AEAGPXRD02","新设备","Bruker","Bruker_JV-DX","XRD","Rls",1,"台"]
[66,"TF","T-ALN-GF","AEAGTALD02","新设备","Beneq","Beneq_TFS200","ALD原子层沉积","Tier3",1,"台"]
[67,"外延",null,"AEBGVAKE01","新设备","昂坤视觉",0,"GaN外延缺陷检测","EQ setup",1,"台"]
[68,"SIC外延",null,"AEBSVFTS03","新设备","Semilab","EIR-2201","FTIR厚度测试设备","Rls",1,"台"]
[69,"ET","E-SOL-GM","AEAGESOL10","新设备","中电45所","MT-807SXSC","有机清洗机-Solvent","Rls",1,"台"]
[70,"DF","D-RTS-GM","AEAGDRTS05","新设备","AG","AW820R","正面快速退火","Tier3",1,"台"]
[71,"SIC外延",null,"AEBSVFTS04","新设备","Semilab","EIR-2201","FTIR厚度测试设备","Tier1",1,"台"]
[72,"SIC外延",null,"AEBSVFTS02","新设备","Semilab","EIR-2201","FTIR厚度测试设备","Tier3",1,"台"]
[73,"ET",null,"AEAGENMP03","新设备","全芯微电子","AST8C-111","湿法有机去胶（NMP+IPA)","Rls",1,"台"]
[74,"SIC外延",null,"AEBSVMCS05","新设备","Semilab","MCV-530L","MCV掺杂测试设备","Tier1",1,"台"]
[75,"SIC外延",null,"AEBSVMCS04","新设备","Semilab","MCV-530L","MCV掺杂测试设备","Tier1",1,"台"]
[76,"SIC外延",null,"AEBSVMCS03","新设备","Semilab","MCV-530L","MCV掺杂测试设备","Tier2",1,"台"]
[77,"ET","E-SC2-GF","AEAGEWWB01","旧设备",null,null,"无机清洗机（RCA）","Rls",1,"台"]
[78,"SIC外延",null,"AEBSMAFM02","新设备","Park","AFM-NX20","原子力显微镜","Tier3",1,"台"]
[79,"SIC外延",null,"AEBSVMCM02","新设备","苏州微著","MCV-200","MCV","Rls",1,"台"]
[80,"WAT","/","AEAGWPIV02","新设备","湖南时变","AM 3200","高压脉冲测试仪","Rls",1,"台"]
[81,"WAT",null,"AEAGBBML02","旧设备","ULVAC","ESZ-R","Back Metal Evaporation","Rls",1,"台"]
[82,"SIC外延",null,"AEBSVGCM01","新设备","北京特思迪","TAP600","CMP",null,1,"台"]
[83,"EAR",null,"AEAGMSOT13","新设备","上海微松","MWS-2000-S2CV5F","晶圆分拣机","Tier2",1,"台"]
[84,"EAR",null,"AEAGMSOT11","新设备","上海微松","MWS-2000","晶圆分拣机","Rls",1,"台"]
[85,"外延","/","AEAGVHAL01","新设备","北京翠海","CH-110","Hall","Rls",1,"台"]
[86,"WAT","W-CPD-GB","AEAGWCPD12","Demo机台","佛山联动","QT-8400","CP测试机","Rls",1,"台"]
[87,"ET",null,"AEAGEMAK05","新设备(DEMO)","莱普","WLP30P-15MS","激光打标机","demo通过",1,"台"]